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dc.contributor.author Natarajan, S
dc.contributor.author Parker, CB
dc.contributor.author Piascik, JR
dc.contributor.author Gilchrist, KH
dc.contributor.author Stoner, BR
dc.contributor.author Glass, JT
dc.date.accessioned 2011-04-15T16:46:53Z
dc.date.issued 2010-06-15
dc.identifier.citation Journal of Applied Physics, 2010, 107 (12)
dc.identifier.issn 0021-8979
dc.identifier.uri http://hdl.handle.net/10161/3384
dc.description.abstract Two designs of a microscale electron ionization (EI) source are analyzed herein: a 3-panel design and a 4-panel design. Devices were fabricated using microelectromechanical systems technology. Field emission from carbon nanotube provided the electrons for the EI source. Ion currents were measured for helium, nitrogen, and xenon at pressures ranging from 10-4 to 0.1 Torr. A comparison of the performance of both designs is presented. The 4-panel microion source showed a 10× improvement in performance compared to the 3-panel device. An analysis of the various factors affecting the performance of the microion sources is also presented. SIMION, an electron and ion optics software, was coupled with experimental measurements to analyze the ion current results. The electron current contributing to ionization and the ion collection efficiency are believed to be the primary factors responsible for the higher efficiency of the 4-panel microion source. Other improvements in device design that could lead to higher ion source efficiency in the future are also discussed. These microscale ion sources are expected to find application as stand alone ion sources as well as in miniature mass spectrometers. © 2010 American Institute of Physics.
dc.language.iso en_US en_US
dc.relation.ispartof Journal of Applied Physics
dc.relation.isversionof 10.1063/1.3429220
dc.title Analysis of 3-panel and 4-panel microscale ionization sources
dc.type Journal Article
dc.description.version Version of Record en_US
duke.date.pubdate 2010-6-15 en_US
duke.description.endpage 124508 en_US
duke.description.issue 12 en_US
duke.description.startpage 124508 en_US
duke.description.volume 107 en_US
dc.relation.journal Journal of Applied Physics en_US
pubs.issue 12
pubs.organisational-group /Duke
pubs.organisational-group /Duke/Institutes and Provost's Academic Units
pubs.organisational-group /Duke/Institutes and Provost's Academic Units/Initiatives
pubs.organisational-group /Duke/Institutes and Provost's Academic Units/Initiatives/Duke Science & Society
pubs.organisational-group /Duke/Institutes and Provost's Academic Units/Initiatives/Energy Initiative
pubs.organisational-group /Duke/Pratt School of Engineering
pubs.organisational-group /Duke/Pratt School of Engineering/Electrical and Computer Engineering
pubs.publication-status Published
pubs.volume 107

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