Show simple item record Jenness, NJ Hill, RT Hucknall, A Chilkoti, A Clark, RL
dc.coverage.spatial United States 2011-06-21T17:27:43Z 2010-05-24
dc.identifier 199634
dc.identifier.citation Opt Express, 2010, 18 (11), pp. 11754 - 11762
dc.description.abstract We demonstrate a diffractive maskless lithographic system that is capable of rapidly performing both serial and single-shot micropatterning. Utilizing the diffractive properties of phase holograms displayed on a spatial light modulator, arbitrary intensity distributions were produced to form two and three dimensional micropatterns/structures in a variety of substrates. A straightforward graphical user interface was implemented to allow users to load templates and change patterning modes within the span of a few minutes. A minimum resolution of approximately 700 nm is demonstrated for both patterning modes, which compares favorably to the 232 nm resolution limit predicted by the Rayleigh criterion. The presented method is rapid and adaptable, allowing for the parallel fabrication of microstructures in photoresist as well as the fabrication of protein microstructures that retain functional activity.
dc.format.extent 11754 - 11762
dc.language ENG
dc.language.iso en_US en_US
dc.relation.ispartof Opt Express
dc.subject Equipment Design
dc.subject Equipment Failure Analysis
dc.subject Light
dc.subject Manufactured Materials
dc.subject Miniaturization
dc.subject Optical Devices
dc.subject Refractometry
dc.title A versatile diffractive maskless lithography for single-shot and serial microfabrication.
dc.title.alternative en_US
dc.type Journal Article
dc.description.version Version of Record en_US 2010-5-24 en_US
duke.description.endpage 11762 en_US
duke.description.issue 11 en_US
duke.description.startpage 11754 en_US
duke.description.volume 18 en_US
dc.relation.journal Optics Express en_US
pubs.issue 11
pubs.organisational-group /Duke
pubs.organisational-group /Duke/Pratt School of Engineering
pubs.organisational-group /Duke/Pratt School of Engineering/Biomedical Engineering
pubs.organisational-group /Duke/School of Medicine
pubs.organisational-group /Duke/School of Medicine/Institutes and Centers
pubs.organisational-group /Duke/School of Medicine/Institutes and Centers/Duke Cancer Institute
pubs.organisational-group /Duke/Trinity College of Arts & Sciences
pubs.organisational-group /Duke/Trinity College of Arts & Sciences/Chemistry
pubs.publication-status Published
pubs.volume 18
dc.identifier.eissn 1094-4087

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