Browsing by Author "Ma, GHM"

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Electron microscopic characterization of diamond films grown on Si by bias-controlled chemical vapor deposition

Ma, GHM; Lee, YH; Glass, JT (Journal of Materials Research, 1990-01-01)

Diamond films grown by Bias-Controlled Hot Filament Chemical Vapor Deposition (BCCVD) on silicon (Si) substrates were characterized by Transmission Electron Microscopy (TEM). Both plan-view and cross-sectional TEM samples ...