On-chip electron-impact ion source using carbon nanotube field emitters
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A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American Institute of Physics.
Published Version (Please cite this version)10.1063/1.2715457
Publication InfoBower, Christopher A; Gilchrist, Kristin H; Piascik, Jeffrey R; Stoner, Brian R; Natarajan, Srividya; Parker, Charles B; ... Glass, Jeffrey T (2007). On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters, 90(12). 10.1063/1.2715457. Retrieved from https://hdl.handle.net/10161/10604.
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Professor of Electrical and Computer Engineering
Jeffrey T. Glass is a Professor in the Department of Electrical and Computer Engineering and the Sr. Associate Dean for Education and Learning Innovation. He holds the Hogg Family endowed chair in Engineering Management and Entrepreneurship. Formerly, he was the Co-Director of The Institute for the Integration of Management and Engineering at Case Western Reserve University (CWRU) and held the Joseph F. Toot, Jr. endowed chair in the Case School of Engineering. Prior to these university app
Senior Laboratory Administrator
Research Professor in the Department of Electrical and Computer Engineering
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