On-chip electron-impact ion source using carbon nanotube field emitters
Abstract
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission
electron source was fabricated and characterized. The device consists of a cathode
with aligned carbon nanotubes, a control grid, and an ion collector electrode. The
electron-impact ionization of He, Ar, and Xe was studied as a function of field emission
current and pressure. The ion current was linear with respect to gas pressure from
10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity
of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American
Institute of Physics.
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https://hdl.handle.net/10161/10604Published Version (Please cite this version)
10.1063/1.2715457Publication Info
(2007). On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters, 90(12). 10.1063/1.2715457. Retrieved from https://hdl.handle.net/10161/10604.This is constructed from limited available data and may be imprecise. To cite this
article, please review & use the official citation provided by the journal.
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Show full item recordScholars@Duke
Jeffrey Glass
Professor of Electrical and Computer Engineering
Jeffrey T. Glass is a Professor in the Department of Electrical and Computer Engineering
and Director of the Institute for Enterprise Engineering. He holds the Hogg Family
endowed chair in Engineering Management and Entrepreneurship. Formerly, he was the
Co-Director of The Institute for the Integration of Management and Engineering at
Case Western Reserve University (CWRU) and held the Joseph F. Toot, Jr. endowed chair
in the Case School of Engineering. Prior to these university appointment
Charles Parker
Senior Laboratory Administrator
Brian R. Stoner
Research Professor in the Department of Electrical and Computer Engineering
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