On-chip electron-impact ion source using carbon nanotube field emitters
Abstract
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission
electron source was fabricated and characterized. The device consists of a cathode
with aligned carbon nanotubes, a control grid, and an ion collector electrode. The
electron-impact ionization of He, Ar, and Xe was studied as a function of field emission
current and pressure. The ion current was linear with respect to gas pressure from
10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity
of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American
Institute of Physics.
Type
Journal articlePermalink
https://hdl.handle.net/10161/10604Published Version (Please cite this version)
10.1063/1.2715457Publication Info
(2007). On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters, 90(12). 10.1063/1.2715457. Retrieved from https://hdl.handle.net/10161/10604.This is constructed from limited available data and may be imprecise. To cite this
article, please review & use the official citation provided by the journal.
Collections
More Info
Show full item recordScholars@Duke
Jeffrey Glass
Professor of Electrical and Computer Engineering
Jeffrey T. Glass is a Professor in the Department of Electrical and Computer Engineering
and the Sr. Associate Dean for Education and Learning Innovation. He holds the Hogg
Family endowed chair in Engineering Management and Entrepreneurship. Formerly, he
was the Co-Director of The Institute for the Integration of Management and Engineering
at Case Western Reserve University (CWRU) and held the Joseph F. Toot, Jr. endowed
chair in the Case School of Engineering. Prior to these university app
Charles Parker
Senior Laboratory Administrator
Brian R. Stoner
Research Professor in the Department of Electrical and Computer Engineering
Alphabetical list of authors with Scholars@Duke profiles.
Articles written by Duke faculty are made available through the campus open access policy. For more information see: Duke Open Access Policy
Rights for Collection: Scholarly Articles
Works are deposited here by their authors, and represent their research and opinions, not that of Duke University. Some materials and descriptions may include offensive content. More info