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On-chip electron-impact ion source using carbon nanotube field emitters

dc.contributor.author Bower, Christopher A
dc.contributor.author Gilchrist, Kristin H
dc.contributor.author Piascik, Jeffrey R
dc.contributor.author Stoner, Brian R
dc.contributor.author Natarajan, Srividya
dc.contributor.author Parker, Charles B
dc.contributor.author Wolter, Scott D
dc.contributor.author Glass, Jeffrey T
dc.date.accessioned 2015-09-11T17:47:50Z
dc.date.issued 2007-03-30
dc.identifier.issn 0003-6951
dc.identifier.uri https://hdl.handle.net/10161/10604
dc.description.abstract A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American Institute of Physics.
dc.publisher AIP Publishing
dc.relation.ispartof Applied Physics Letters
dc.relation.isversionof 10.1063/1.2715457
dc.title On-chip electron-impact ion source using carbon nanotube field emitters
dc.type Journal article
duke.contributor.id Stoner, Brian R|0338221
duke.contributor.id Parker, Charles B|0310366
duke.contributor.id Glass, Jeffrey T|0204908
pubs.issue 12
pubs.organisational-group Duke
pubs.organisational-group Duke Science & Society
pubs.organisational-group Electrical and Computer Engineering
pubs.organisational-group Initiatives
pubs.organisational-group Institutes and Provost's Academic Units
pubs.organisational-group Pratt School of Engineering
pubs.publication-status Published
pubs.volume 90
duke.contributor.orcid Stoner, Brian R|0000-0002-3975-3195
duke.contributor.orcid Parker, Charles B|0000-0002-7831-1242


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