Facet-embedded thin-film III-V edge-emitting lasers integrated with SU-8 waveguides on silicon.

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2010-10-15

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Abstract

A thin-film InGaAs/GaAs edge-emitting single-quantum-well laser has been integrated with a tapered multimode SU-8 waveguide onto an Si substrate. The SU-8 waveguide is passively aligned to the laser using mask-based photolithography, mimicking electrical interconnection in Si complementary metal-oxide semiconductor, and overlaps one facet of the thin-film laser for coupling power from the laser to the waveguide. Injected threshold current densities of 260A/cm(2) are measured with the reduced reflectivity of the embedded laser facet while improving single mode coupling efficiency, which is theoretically simulated to be 77%.

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Jokerst

Nan Marie Jokerst

J. A. Jones Distinguished Professor of Electrical and Computer Engineering

Dr. Nan Marie Jokerst is the J. A. Jones Distinguished Professor of Electrical and Computer Engineering at Duke University, and the Executive Director of the Duke Shared Materials Instrumentation Facility, a Duke shared cleanroom and characterization facility. She received her BS in Physics from Creighton University in 1982, and her MS and PhD in Electrical Engineering from the University of Southern California in 1984 and 1989, respectively. She is a Fellow of the IEEE, and has served as an elected member of the IEEE LEOS Board of Governors, and as the VP for Conferences and as the VP Technical Affairs. She is a Fellow of the Optical Society of America, and has served as Chair of the OSA Engineering Council. Her awards include an NSF Presidential Young Investigator Award, an IEEE Third Millenium Medal, the IEEE/HP Harriet B. Rigas Medal, and the Alumni in Academia Award for the University of Southern California Viterbi School of Engineering. She currently serves on the National Academies Board on Global Science and Technology. She has published over 200 refereed journal and conference publications, and has 6 patents.


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