Skip to main content
Duke University Libraries
DukeSpace Scholarship by Duke Authors
  • Login
  • Ask
  • Menu
  • Login
  • Ask a Librarian
  • Search & Find
  • Using the Library
  • Research Support
  • Course Support
  • Libraries
  • About
View Item 
  •   DukeSpace
  • Theses and Dissertations
  • Duke Dissertations
  • View Item
  •   DukeSpace
  • Theses and Dissertations
  • Duke Dissertations
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Fast Large-Scale Electromagnetic Simulation of Doubly Periodic Structures in Layered Media

Thumbnail
View / Download
5.2 Mb
Date
2020
Author
Mao, Yiqian
Advisor
Liu, Qing H.
Repository Usage Stats
141
views
147
downloads
Abstract

This work focuses on the electromagnetic simulation of doubly periodic structures embedded in layered media, which can be commonly found in extreme ultraviolet (EUV) lithography, metasurfaces, and frequency selective surfaces. Such problems can be solved by rigorous numerical methods like finite-difference time-domain (FDTD) method and finite element method (FEM). However, FDTD and FEM are universal methods far from achieving the best efficiency for the target problem. To exploit the problem property and facilitate the problem solving of large size in low complexity, two approaches are proposed.

The first approach, Calder\'{o}n preconditioned spectral-element spectral-integral (CP-SESI) method, is an improvement over the existing finite-element boundary-integral method. By introducing the Calder\'{o}n preconditioner, domain decomposition and the fast Fourier transform technique, the time and memory complexity of CP-SESI is reduced to O(N\textsuperscript{1.30}) and O(N\textsuperscript{1.07}), respectively.

The second approach, based on modified U-Net, introduces two stages of problem solving: the training stage and the inference stage. In the training stage, accurate data generated by the rigorous CP-SESI solver is fed to the U-Net. In the inference stage, the U-Net can be applied to solve unseen problems in real time. Particularly, the EUV problem with mask size of 4 um by 4 um can be solved on a personal desktop within 5 min on CPU or 30 s on GPU.

Besides, two types of equivalent boundary conditions to replace thin structures are developed and incorporated into the framework of CP-SESI. The first one, surface current boundary condition, has better accuracy for resistive materials. The second one, impedance transition boundary condition, is more accurate for conductive materials. The accuracy comparison between the above two boundary conditions are compared.

Description
Dissertation
Type
Dissertation
Department
Electrical and Computer Engineering
Subject
Electrical engineering
Computational physics
Electromagnetics
Doubly periodic structures
Optical lithography
Spectral-element boundary-integral
Permalink
https://hdl.handle.net/10161/22184
Citation
Mao, Yiqian (2020). Fast Large-Scale Electromagnetic Simulation of Doubly Periodic Structures in Layered Media. Dissertation, Duke University. Retrieved from https://hdl.handle.net/10161/22184.
Collections
  • Duke Dissertations
More Info
Show full item record
Creative Commons License
This work is licensed under a Creative Commons Attribution-Noncommercial-No Derivative Works 3.0 United States License.

Rights for Collection: Duke Dissertations


Works are deposited here by their authors, and represent their research and opinions, not that of Duke University. Some materials and descriptions may include offensive content. More info

Make Your Work Available Here

How to Deposit

Browse

All of DukeSpaceCommunities & CollectionsAuthorsTitlesTypesBy Issue DateDepartmentsAffiliations of Duke Author(s)SubjectsBy Submit DateThis CollectionAuthorsTitlesTypesBy Issue DateDepartmentsAffiliations of Duke Author(s)SubjectsBy Submit Date

My Account

LoginRegister

Statistics

View Usage Statistics
Duke University Libraries

Contact Us

411 Chapel Drive
Durham, NC 27708
(919) 660-5870
Perkins Library Service Desk

Digital Repositories at Duke

  • Report a problem with the repositories
  • About digital repositories at Duke
  • Accessibility Policy
  • Deaccession and DMCA Takedown Policy

TwitterFacebookYouTubeFlickrInstagramBlogs

Sign Up for Our Newsletter
  • Re-use & Attribution / Privacy
  • Harmful Language Statement
  • Support the Libraries
Duke University