A versatile diffractive maskless lithography for single-shot and serial microfabrication.

dc.contributor.author

Jenness, Nathan J

dc.contributor.author

Hill, Ryan T

dc.contributor.author

Hucknall, Angus

dc.contributor.author

Chilkoti, Ashutosh

dc.contributor.author

Clark, Robert L

dc.coverage.spatial

United States

dc.date.accessioned

2011-06-21T17:27:43Z

dc.date.issued

2010-05-24

dc.description.abstract

We demonstrate a diffractive maskless lithographic system that is capable of rapidly performing both serial and single-shot micropatterning. Utilizing the diffractive properties of phase holograms displayed on a spatial light modulator, arbitrary intensity distributions were produced to form two and three dimensional micropatterns/structures in a variety of substrates. A straightforward graphical user interface was implemented to allow users to load templates and change patterning modes within the span of a few minutes. A minimum resolution of approximately 700 nm is demonstrated for both patterning modes, which compares favorably to the 232 nm resolution limit predicted by the Rayleigh criterion. The presented method is rapid and adaptable, allowing for the parallel fabrication of microstructures in photoresist as well as the fabrication of protein microstructures that retain functional activity.

dc.description.version

Version of Record

dc.identifier

http://www.ncbi.nlm.nih.gov/pubmed/20589036

dc.identifier

199634

dc.identifier.eissn

1094-4087

dc.identifier.uri

https://hdl.handle.net/10161/4242

dc.language

eng

dc.language.iso

en_US

dc.publisher

The Optical Society

dc.relation.ispartof

Opt Express

dc.relation.journal

Optics Express

dc.subject

Equipment Design

dc.subject

Equipment Failure Analysis

dc.subject

Light

dc.subject

Manufactured Materials

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Miniaturization

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Optical Devices

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Refractometry

dc.title

A versatile diffractive maskless lithography for single-shot and serial microfabrication.

dc.title.alternative
dc.type

Journal article

duke.date.pubdate

2010-5-24

duke.description.issue

11

duke.description.volume

18

pubs.author-url

http://www.ncbi.nlm.nih.gov/pubmed/20589036

pubs.begin-page

11754

pubs.end-page

11762

pubs.issue

11

pubs.organisational-group

Biomedical Engineering

pubs.organisational-group

Chemistry

pubs.organisational-group

Duke

pubs.organisational-group

Duke Cancer Institute

pubs.organisational-group

Institutes and Centers

pubs.organisational-group

Pratt School of Engineering

pubs.organisational-group

School of Medicine

pubs.organisational-group

Trinity College of Arts & Sciences

pubs.publication-status

Published

pubs.volume

18

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